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HRZ-F- SEMI Standard Double Inverter Chiller- for Fluorinated Coolant - HRZ-F, SEMI Standard Double Inverter Chiller, for Fluorinated Coolant

  • Brand: SMC
  • Product Code: HRZ-F- SEMI Standard Double Inverter Chiller- for Fluorinated Coolant
Description: HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
Description: HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
Configuration Options
  
 
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Select values from the drop down lists or make appropriate selections to configure the part number.
Cooling Capacity Configuration Status
Communication Configuration Status
Option Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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