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HRZ-F- SEMI Standard Pump Inverter Chiller- for Fluorinated Coolant - HRZ-F, SEMI Standard Pump Inverter Chiller, for Fluorinated Coolant

  • Brand: SMC
  • Product Code: HRZ-F- SEMI Standard Pump Inverter Chiller- for Fluorinated Coolant
Description: HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
Description: HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
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