High Vacuum

Series XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS..

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..

Series XSA is a normally closed solenoid valve suitable for air or inert gas in high vacuum applicat..

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..

Smooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male & fema..

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..

Series XGT slit valve is suitable for the partition valve between the load lock chamber and the tran..

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..

Series XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum a..

XLJ is a limited release series pairing a vacuum angle valve with a release valve. The release valv..

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..

Series XGTP slit valve functions as a portal between chambers of semiconductor equipment. Typical p..