HRZ-F- SEMI Standard Pump Inverter Chiller- for Tap or DI Water Coolant - HRZ-F, SEMI Standard Pump Inverter Chiller, for Tap or DI Water Coolant
- Brand: SMC
- Product Code: HRZ-F- SEMI Standard Pump Inverter Chiller- for Tap or DI Water Coolant
Description: HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.
Description: HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.
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