High Vacuum for semiconductor wafer manufacturing requires precision equipment to exhaust air from the process chamber and to supply atmospheric to restore the chanber to atmospheric pressure.
Slit Valves (XGTP) allow access to transfer the wafer into and out of the process chamber.
Angle and Inline Valves (XL, XM, XY) are used to exhaust the chamber.
Supply Valves (XSA, XVD) are used to supply gases to the chamber.
#XLD- Aluminum High Vacuum Angle Valve- Air Operated
SMC
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..
$1.00
Available Quantity: 0
#XLDV- Aluminum High Vacuum Angle Valves- Air Operated w/Solenoid Valve
SMC
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..
$1.00
Available Quantity: 0
#XLG- Aluminum High Vacuum Angle Valve- Double Acting- O-ring Seal
SMC
XLG is a double acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares comm..
$1.00
Available Quantity: 0
#XLFV- Aluminum High Vacuum Angle Valve- Normally Closed- O-ring Seal with Solenoid Valve
SMC
Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum an..
$1.00
Available Quantity: 0
#XLS- High Vacuum Angle Valve- Electromagnetic Type- Bellows Balance
SMC
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..
$1.00
Available Quantity: 0
#XM and XY- High Vacuum Valves- Stainless Steel- Angle and In-line Types
SMC
Series XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS..
$1.00
Available Quantity: 0
#XLF- Aluminum High Vacuum Angle Valve- Normally Closed- O-ring Seal
SMC
XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The..
$1.00
Available Quantity: 0
#XGT*- High Vacuum Slit Valve
SMC
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the tran..
$1.00
Available Quantity: 0
#XLAV- Aluminum High Vacuum Angle Valves- Air Operated w/Solenoid Valve
SMC
Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum an..
$1.00
Available Quantity: 0
#XVD2- High Vacuum Valve- Smooth Vent
SMC
Smooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male & fema..
$1.00
Available Quantity: 0
#XL*Q- High Vacuum Angle Valve- Aluminum One-touch Connection & Release
SMC
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..
$1.00
Available Quantity: 0
#XLA- Aluminum High Vacuum Angle Valve- Normally Closed/Bellows Seal
SMC
Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and..
$1.00
Available Quantity: 0
#XLH- High Vacuum Manual Angle Valve- Bellows Seal
SMC
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..
$1.00
Available Quantity: 0
#XLC- Aluminum High Vacuum Angle Valve- Double Acting- Bellows Seal
SMC
XLC is a double acting high vacuum angle valve with a bellows seal for the shaft. The XL* family sha..
$1.00
Available Quantity: 0
#XSA- NC Type- Straight Solenoid Valve
SMC
Series XSA is a normally closed solenoid valve suitable for air or inert gas in high vacuum applicat..
$1.00
Available Quantity: 0
#XLJ- Vacuum Angle Valve w/Release Valve
SMC
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform tempe..
$1.00
Available Quantity: 0
#XGTP- Parallel Seal Slit Valve for High Vacuum
SMC
Series XGTP slit valve functions as a portal between chambers of semiconductor equipment. Typical p..
$1.00
Available Quantity: 0
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