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XGTP- Parallel Seal Slit Valve for High Vacuum - XGTP, Parallel Seal Slit Valve for High Vacuum

  • Brand: SMC
  • Product Code: XGTP- Parallel Seal Slit Valve for High Vacuum
Description: Series XGTP slit valve functions as a portal between chambers of semiconductor equipment. Typical positions include between the transfer chamber and load lock chamber, or transfer and process chambers. The XGTP has been designed for easier maintenance, including easy access to replace the actuator bellows or the gate. Low particle generation and a 3 million cycle sevice life support high productivity of the semiconductor tools.
Description: Series XGTP slit valve functions as a portal between chambers of semiconductor equipment. Typical positions include between the transfer chamber and load lock chamber, or transfer and process chambers. The XGTP has been designed for easier maintenance, including easy access to replace the actuator bellows or the gate. Low particle generation and a 3 million cycle sevice life support high productivity of the semiconductor tools.
Configuration Options
  
 
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Valve Type Configuration Status
Gate O-ring Material Configuration Status
Auto Switch & Connector Configuration Status
End Lock Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

  • Series Catalog

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  • CAD Download

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