XLG- Aluminum High Vacuum Angle Valve- Double Acting- O-ring Seal - XLG, Aluminum High Vacuum Angle Valve, Double Acting, O-ring Seal
- Brand: SMC
- Product Code: XLG- Aluminum High Vacuum Angle Valve- Double Acting- O-ring Seal
Description: XLG is a double acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination
Description: XLG is a double acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination