XLF- Aluminum High Vacuum Angle Valve- Normally Closed- O-ring Seal - XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal
- Brand: SMC
- Product Code: XLF- Aluminum High Vacuum Angle Valve- Normally Closed- O-ring Seal
Description: XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
Description: XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
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