Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
#XGT*- High Vacuum Slit Valve
SMC
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the tran..
$1.00
Available Quantity: 0
#XGTP- Parallel Seal Slit Valve for High Vacuum
SMC
Series XGTP slit valve functions as a portal between chambers of semiconductor equipment. Typical p..
$1.00
Available Quantity: 0
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